eumeX SDD EDX Defect Review SEM

Custom designed EDX detectors

Maintenance-free EDX detector for SEMVision® CX / G2 / G3 / G4
Hitachi RS-3000 / RS-4000

Our SedonaSV is a state-of-the-art SDD detector that replaces the high-maintenance and obsolete Si(Li) detector inside the Defect Review SEM with a maintenance-free EDX sensor, without any changes to the signal processing electronics or the application.
The first generations of Defect Review Scanning Electron Microscopes were equipped with Si(Li) detectors for elemental surface analysis (EDX). Those require a near liquid nitrogen temperature for operation and are cooled by a Polycold® PCC with CryoTiger®-Technology with the requirement for periodical service.

Now	SedonaSV SDD
● cooled with refrigerant and compressor	● cooled thermoelectrically
● quartely filter replacement	● maintenance-free
● tool-down time for bake out	● continous operation
● hazardous material (PT-14)	● sustainable, lifetime elongation of tool
● obsolete sensor technology	● state-of-the-art technology
	● ~ 4x faster data aqcuisition
	● improved peak separation

eumeX Instrumentebau GmbH
Haidering 7
65321 Heidenrod
GERMANY

Phone:
+49 160 9102 4940
e-mail:
info@eumex.com

Trademark Recognition
AMAT® and SEMVision® are registered trademarks of Applied Materials Inc.
Polycold® and CryoTiger® are registered trademarks of Edwards (part of the Atlas Copco Group)
Mentioned trademarks, trade names and logos are the property of their respective owners.